Supported EtherCAT Node
MCP-50 Mass Flow Controller
In the chemical, medical, manufacturing and power industries, Alicat instruments rapidly and precisely monitor and control critical process parameters. The speed and reliability of Alicat devices are particularly well suited to vacuum coating processes, such as Atomic Layer Deposition and Chemical Vapor Deposition. All of the mass flow or pressure controller’s data, including: mass flow, volumetric flow, pressure, temperature, selected gas calibration, setpoint, and totalized flow can be output to a central PLC running a compatible automation protocol. Users may also change setpoint or gas selection, and issue other commands remotely.
PC-based EtherCAT Motion Controller
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